Title:
圧電振動デバイスの製造方法
Document Type and Number:
Japanese Patent JP4706546
Kind Code:
B2
Inventors:
Shunsuke Sato
Application Number:
JP2006112471A
Publication Date:
June 22, 2011
Filing Date:
April 14, 2006
Export Citation:
Assignee:
Great Vacuum Co., Ltd.
International Classes:
H03H3/02; H01L23/02; H03H9/02; H03H9/215
Domestic Patent References:
| JP2000223604A | ||||
| JP2000294665A |
Attorney, Agent or Firm:
Patent Business Corporation Ark Patent Office
Yoshiro Kurauchi
Yoshiro Kurauchi