Title:
MANUFACTURING METHOD FOR PIEZOELECTRIC VIBRATION PIECE, PIEZOELECTRIC VIBRATION PIECE, PIEZOELECTRIC TRANSDUCER, OSCILLATOR, ELECTRONIC APPARATUS, AND WAVE CLOCK
Document Type and Number:
Japanese Patent JP2012165191
Kind Code:
A
Abstract:
To provide a manufacturing method for a piezoelectric vibration piece, a piezoelectric vibration piece, a piezoelectric transducer, an oscillator, an electronic apparatus, and a wave clock, capable of uniformly forming a coating pattern on a piezoelectric plate while suppressing the increase in manufacturing ma-hours, degradation of manufacturing efficiency and fluctuations in vibration characteristics.
A photoresist film formation process is implemented with a formation device 71 that includes a sprayer 73 for spraying a photoresist material by generating an air flow toward a metal film 43 on a wafer S and a plurality of spacers 74 arranged between a work stage 72 and the wafer S.
Inventors:
IROKAWA TAIKI
Application Number:
JP2011024239A
Publication Date:
August 30, 2012
Filing Date:
February 07, 2011
Export Citation:
Assignee:
SEIKO INSTR INC
International Classes:
H03H3/02; H01L41/09; H01L41/18; H01L41/22; H01L41/23; H01L41/29; H01L41/39; H03B5/32; H03H9/02
Attorney, Agent or Firm:
Kentaro Kuhara
Noriaki Uchino
Nobuyuki Kimura
Noriaki Uchino
Nobuyuki Kimura