Title:
圧電振動子、発振器、電子機器及び電波時計並びに圧電振動子の製造方法
Document Type and Number:
Japanese Patent JP5226791
Kind Code:
B2
Abstract:
A piezoelectric vibrator includes a base substrate and a lid substrate which are bonded to each other with a cavity formed therebetween; a piezoelectric vibrating reed which has a pair of vibration arm portions extending in parallel and is mounted on the base substrate within the cavity; and a getter material of a metallic film that is formed on the base substrate or the lid substrate so as to be arranged within the cavity and improve a degree of vacuum within the cavity by being heated. A restriction portion, which is arranged in the cavity and restricts a scattering direction of the getter material evaporated by the heating to suppress a scattering amount scattering toward the vibration arm portion, is formed in the base substrate or the lid substrate.
Inventors:
Otsuka Osamu
Junya Fukuda
Sugama Kazuyoshi
Junya Fukuda
Sugama Kazuyoshi
Application Number:
JP2010526449A
Publication Date:
July 03, 2013
Filing Date:
August 27, 2008
Export Citation:
Assignee:
Seiko Instruments Inc.
International Classes:
H03H3/02; H01L41/09; H01L41/18; H01L41/22; H01L41/23; H01L41/313; H03B5/32; H03H9/02; H03H9/17; H03H9/19
Domestic Patent References:
| JPH10206455A | 1998-08-07 | |||
| JP2003142976A | 2003-05-16 | |||
| JP2007081697A | 2007-03-29 | |||
| JPH10206455A | 1998-08-07 | |||
| JP2003142976A | 2003-05-16 |
Attorney, Agent or Firm:
Kentaro Kuhara
Noriaki Uchino
Nobuyuki Kimura
Noriaki Uchino
Nobuyuki Kimura