Title:
多結晶シリコン膜の製造方法
Document Type and Number:
Japanese Patent JP4919717
Kind Code:
B2
Inventors:
Shinsuke Yura
Atsuhiro Sono
Tatsuki Okamoto
Kazuyuki Sugahara
Kazushi Yamayoshi
Atsuhiro Sono
Tatsuki Okamoto
Kazuyuki Sugahara
Kazushi Yamayoshi
Application Number:
JP2006187963A
Publication Date:
April 18, 2012
Filing Date:
July 07, 2006
Export Citation:
Assignee:
Mitsubishi Electric Corporation
International Classes:
H01L21/20; H01L21/268; H01L21/336; H01L29/786
Domestic Patent References:
| JP2005072440A | ||||
| JP2005166768A | ||||
| JP2003324067A | ||||
| JP2001126987A |
Attorney, Agent or Firm:
Yoshitake Hidetoshi
Takahiro Arita
Takahiro Arita