Title:
MANUFACTURING METHOD OF REAR SURFACE IRRADIATION TYPE IMAGING ELEMENT, AND REAR SURFACE IRRADIATION TYPE IMAGING ELEMENT
Document Type and Number:
Japanese Patent JP2008177485
Kind Code:
A
Abstract:
To surely remove electrical noises due to the presence of an interface at which different conduction type layers are laminated on a cut surface of a rear surface irradiation type imaging element, by a simple process.
The cut surface 38 for cutting off a chip 11 to be the rear surface irradiation type imaging element is so formed as to have an inclination to the principal surface of the chip 11. An impurity ion of first or second conduction type is injected in the cut surface 38. The cut surface 38 is subjected to laser annealing to form a coating layer 21 having a single conduction type corresponding to the impurity ion injected in the surface of the cut surface 38.
Inventors:
ETO KOJI
HAYASHIDA TETSUYA
ARAI SHIYUNKI
HAYASHIDA TETSUYA
ARAI SHIYUNKI
Application Number:
JP2007011553A
Publication Date:
July 31, 2008
Filing Date:
January 22, 2007
Export Citation:
Assignee:
UNIV KINKI
JAPAN BROADCASTING CORP
JAPAN BROADCASTING CORP
International Classes:
H01L27/146
Attorney, Agent or Firm:
Hiroshi Yamazaki
Mitsuo Tanaka
Atsushi Maeda
Yoshiyuki Maebori
Mitsuo Tanaka
Atsushi Maeda
Yoshiyuki Maebori