Title:
中継接続部材、検査装置および中継接続部材の製造方法
Document Type and Number:
Japanese Patent JP4767528
Kind Code:
B2
Abstract:
There is provided an inspection device capable of assuring electrical connection to an inspection object and internal electrical connection while coping with downsizing of a terminal of the inspection object. The inspection device includes probe (3), a probe holder (4) holding the probe (3), an inspection circuit (5) for outputting an inspection signal to an inspection object (1) via the probe (3), and a relay connection member (6) for electrically connecting the probe (3) to the inspection circuit (5). The relay connection member (6) includes a first connection member (8) having first wiring structures (11, 12) electrically connected to the probe (3), adjacent structures being formed on different layers, and a second connection member (8) having a second wiring structure (16) electrically connected to the wiring structure (7) arranged on the inspection circuit and formed on the same layer. The relay connection member (6) includes the first connection member (8) appropriate for connection to the probe (3) and the second connection member (9) appropriate for connection to the inspection circuit (5). Thus, it is possible to realize preferable electrical connection to both of them.
Inventors:
Hiroyasu Toma
Toshio Kazama
Toshio Kazama
Application Number:
JP2004355855A
Publication Date:
September 07, 2011
Filing Date:
December 08, 2004
Export Citation:
Assignee:
Nippon Jojo Co., Ltd.
International Classes:
G01R1/073; G01R31/28; H01R11/01
Domestic Patent References:
| JP4184264A | ||||
| JP8315879A | ||||
| JP9184853A | ||||
| JP2000266779A |
Attorney, Agent or Firm:
Hiroaki Sakai