Title:
MANUFACTURING METHOD OF ROTOR FOR VACUUM PUMP, AND ROTOR OBTAINED BY IT
Document Type and Number:
Japanese Patent JP2004263687
Kind Code:
A
Abstract:
To provide a rotor that removes excessive work and waste of material in a case of using a bar material having a nonstandard diameter, has uniform mechanical characteristic and material density, and has improved temperature resistance.
The rotor having a set of radial peripheral vanes for a high vacuum turbomolecular pump is manufactured by forging a metal workpiece to obtain a generally cylindrical bodies 1 and 11 with homogeneous mechanical properties and subsequent mechanical workings.
Inventors:
CASARO FAUSTO
Application Number:
JP2003315745A
Publication Date:
September 24, 2004
Filing Date:
September 08, 2003
Export Citation:
Assignee:
VARIAN SPA
International Classes:
B21K1/36; B21K3/04; F04D19/04; F04D29/32; (IPC1-7): F04D19/04; B21K3/04; F04D29/32
Attorney, Agent or Firm:
Inaoka cultivation
Mio Kawasaki
Mio Kawasaki