Title:
Manufacturing method of semiconductor device
Document Type and Number:
Japanese Patent JP5995640
Kind Code:
B2
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Inventors:
Kazunari Nakata
Application Number:
JP2012224942A
Publication Date:
September 21, 2016
Filing Date:
October 10, 2012
Export Citation:
Assignee:
Mitsubishi Electric Corporation
International Classes:
H01L21/02
Domestic Patent References:
| JP2012174956A | ||||
| JP58102797A | ||||
| JP2008213404A |
Foreign References:
| US5359928 | ||||
| WO2007026541A1 |
Attorney, Agent or Firm:
Fukami patent office