Title:
Manufacturing method of semiconductor device
Document Type and Number:
Japanese Patent JP6111720
Kind Code:
B2
More Like This:
Inventors:
Rou
Application Number:
JP2013026698A
Publication Date:
April 12, 2017
Filing Date:
February 14, 2013
Export Citation:
Assignee:
Fuji Electric Co., Ltd.
International Classes:
H01L21/336; H01L21/316; H01L21/324; H01L21/76; H01L29/06; H01L29/739; H01L29/78
Domestic Patent References:
| JP2005191160A | ||||
| JP2004186620A | ||||
| JP4101434A | ||||
| JP2010003899A |
Attorney, Agent or Firm:
Akira Sakamoto