Title:
Manufacturing method of semiconductor device
Document Type and Number:
Japanese Patent JP6149568
Kind Code:
B2
Inventors:
Shunsuke Noda
Mitsunobu Matsumoto
Kohei Yokoyama
Mitsunobu Matsumoto
Kohei Yokoyama
Application Number:
JP2013150740A
Publication Date:
June 21, 2017
Filing Date:
July 19, 2013
Export Citation:
Assignee:
Mitsubishi Electric Corporation
International Classes:
H01L21/02; C23C14/34; H01L21/285; H01L21/677; H01L21/683
Domestic Patent References:
| JP2012184511A | ||||
| JP2010280987A | ||||
| JP2008075135A | ||||
| JP9302469A | ||||
| JP2010065305A | ||||
| JP2004281618A |
Attorney, Agent or Firm:
Mamoru Takada
Hideki Takahashi
Yoshimi Kuno
Hideki Takahashi
Yoshimi Kuno