Title:
Manufacturing method of semiconductor device
Document Type and Number:
Japanese Patent JP6164220
Kind Code:
B2
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Inventors:
Haruo Nakazawa
Masaaki Tachioka
Naoto Fujishima
Masaaki Ogino
Norihiro Nakajima
Kenichi Iguchi
Masaaki Tachioka
Naoto Fujishima
Masaaki Ogino
Norihiro Nakajima
Kenichi Iguchi
Application Number:
JP2014543178A
Publication Date:
July 19, 2017
Filing Date:
September 05, 2013
Export Citation:
Assignee:
Fuji Electric Co., Ltd.
International Classes:
H01L21/28; H01L21/336; H01L29/12; H01L29/78
Domestic Patent References:
| JP2011171551A | ||||
| JP2008211177A | ||||
| JP2011187753A | ||||
| JP2011159654A | ||||
| JP2006156926A | ||||
| JP2012004185A | ||||
| JP2001144015A | ||||
| JP2012099599A | ||||
| JP10284436A | ||||
| JP2012114480A | ||||
| JP2012156390A | ||||
| JP2002026341A | ||||
| JP2012099598A | ||||
| JP2010186991A | ||||
| JP2000150875A | ||||
| JP2009283754A | ||||
| JP2012178603A | ||||
| JP2005243797A |
Foreign References:
| WO2011111029A1 |
Attorney, Agent or Firm:
Akinori Sakai