Title:
Manufacturing method of semiconductor element
Document Type and Number:
Japanese Patent JP6319111
Kind Code:
B2
Inventors:
Shingo Toya
Jun Nakauchi
Jun Nakauchi
Application Number:
JP2015005586A
Publication Date:
May 09, 2018
Filing Date:
January 15, 2015
Export Citation:
Assignee:
Toyoda Gosei Co., Ltd.
International Classes:
H01L33/42; H01L33/32
Domestic Patent References:
| JP2014154584A | ||||
| JP2001217199A | ||||
| JP2008227109A | ||||
| JP2009283551A | ||||
| JP2005141981A |
Foreign References:
| US6399408 |
Attorney, Agent or Firm:
Osamu Fujitani
Akinori Isshiki
Akinori Isshiki
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