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Title:
MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
Document Type and Number:
Japanese Patent JPS51144579
Kind Code:
A
Abstract:
PURPOSE:In a manufacturing method of a semiconductor device according to a minimode processing, the said method capable of preventing an unnecessary resin starin, suitable for a mall-production, having an excellent working efficiency.

Inventors:
NOMURA TOORU
Application Number:
JP6929375A
Publication Date:
December 11, 1976
Filing Date:
June 09, 1975
Export Citation:
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Assignee:
TOKYO SHIBAURA ELECTRIC CO
International Classes:
H01L21/56; B29C43/00; B29C45/00; B29C45/02; B29C45/14; B29C45/26; (IPC1-7): B29F1/00; H01L21/56



 
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