Title:
半導体装置、半導体装置を内蔵した電子装置及び半導体装置の作製方法
Document Type and Number:
Japanese Patent JP4368840
Kind Code:
B2
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Inventors:
Shunpei Yamazaki
Satoshi Teramoto
Satoshi Teramoto
Application Number:
JP2005298617A
Publication Date:
November 18, 2009
Filing Date:
October 13, 2005
Export Citation:
Assignee:
Semiconductor Energy Laboratory Co., Ltd.
International Classes:
H01L23/52; G02F1/1343; G02F1/1345; H01L21/02; H01L21/336; H01L21/822; H01L21/8234; H01L27/04; H01L27/06; H01L27/08; H01L27/088; H01L27/12; H01L29/786
Domestic Patent References:
| JP714982A | ||||
| JP745787A | ||||
| JP6296023A | ||||
| JP6209168A | ||||
| JP6132421A | ||||
| JP57133698A |