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Patent Searching and Data


Title:
半導体装置の製造方法
Document Type and Number:
Japanese Patent JP4967438
Kind Code:
B2
Abstract:

To provide a semiconductor device which eliminates the need for enlarging a space in which a functional device is formed in order to provide a getter which absorbs impurity gas, and to provide its manufacturing method.

An infrared sensor 1A includes a device substrate 2 and a lid substrate 3A. An infrared detection device 4 is formed on the surface of the device substrate. When the device substrate 2 and the lid substrate 3A are joined together, space 5 is formed between the infrared detection device 4 and the lid substrate 3A. The lid substrate 3A is provided with a tubular electrode 7 allowing a signal from the infrared detection device 4 to be taken to the outside. An open end of the tubular electrode 7 is blocked by a sealing member 9A provided with a getter 10A on its internal recess. The space 5 and the tubular electrode 7 are communicated with each other, allowing the impurity gas within the space 5 to pass through the tubular electrode 7 to be absorbed by the getter 10A.

COPYRIGHT: (C)2008,JPO&INPIT


Inventors:
Fukuyama Yasuhiro
Application Number:
JP2006123794A
Publication Date:
July 04, 2012
Filing Date:
April 27, 2006
Export Citation:
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Assignee:
Nissan Motor Co., Ltd
International Classes:
G01J1/02; H01L37/02
Domestic Patent References:
JP2006010405A
JP2000199727A
JP2002055008A
JP2006088088A
JP2005345245A
Foreign References:
WO2005060004A1
Attorney, Agent or Firm:
Fuyuki Nagai