Title:
半導体力学量センサの製造方法
Document Type and Number:
Japanese Patent JP4085854
Kind Code:
B2
Abstract:
A physical quantity sensor for detecting physical quantity includes a substrate having an opening; a beam protruding in the opening of the substrate and supported on the substrate; and a fixed electrode supported on the substrate. The beam is movable in a vertical direction of the substrate so that the physical quantity in the vertical direction is detectable. The sensor can be minimized, and has excellent output characteristics. Further, a manufacturing cost of the sensor is small.
More Like This:
| JP3457037 | INTEGRATED TYPE ACCELEROMETER |
| JP2001330622 | SEMICONDUCTOR ACCELERATION SENSOR |
| JP3575373 | MANUFACTURE OF EXTERNAL FORCE DETECTION SENSOR |
Inventors:
Koichi Tsubaki
Application Number:
JP2003077746A
Publication Date:
May 14, 2008
Filing Date:
March 20, 2003
Export Citation:
Assignee:
株式会社デンソー
International Classes:
G01P15/125; B81B3/00; G01P15/08; H01L29/84
Domestic Patent References:
| JP2000049358A | ||||
| JP11052278A | ||||
| JP5076186A |
Other References:
Huikai Xie, Gary K.Fedder,A CMOS Z-AXIS CAPACITIVE ACCELEROMETER WITH COMB-FINGER SENSING,MEMS 2000,2000年,496-501
Attorney, Agent or Firm:
Tsuyoshi Sato
Kiyoshi Ogawa
Kiyoshi Ogawa