Title:
単結晶サファイア基板の製造方法
Document Type and Number:
Japanese Patent JP5638452
Kind Code:
B2
Inventors:
松山 寛文
Application Number:
JP2011099817A
Publication Date:
December 10, 2014
Filing Date:
April 27, 2011
Export Citation:
Assignee:
株式会社ディスコ
International Classes:
C30B29/20; B24B27/06; C30B33/00; H01L21/304
Attorney, Agent or Firm:
Hiroaki Sakai