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Title:
固体撮像素子および固体撮像素子の製造方法
Document Type and Number:
Japanese Patent JP4942283
Kind Code:
B2
Abstract:

To provide a solid-state imaging device which can surely restrain component out of smear component in which component electrons which are generated on the surface of a semiconductor substrate by incident light spread in a lateral direction along the surface of the substrate, pass a channel stop portion, and permeate a transmission channel region; and to provide a method for manufacturing the solid-state imaging device.

In the CCD solid-state imaging device, the channel stop 50 is formed along the transfer direction of a perpendicular charge transmission portion 30 at a part between a light receiving part 20 and the perpendicular charge transmission portion 30 of an adjacent light receiving part. By forming a getter 60 in the channel stop 50, electrons which are generated on the surface of the semiconductor substrate by incident light, spread in a lateral direction along the surface of the substrate, and enter the channel stop 50 of an opposite side of a read-out side are captured by the getter 60. As a result, leaking to the transmission channel region 31 is prevented surely.

COPYRIGHT: (C)2005,JPO&NCIPI


Inventors:
Takizawa Ritsuo
Application Number:
JP2003128582A
Publication Date:
May 30, 2012
Filing Date:
May 07, 2003
Export Citation:
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Assignee:
ソニー株式会社
International Classes:
H01L27/148; H01L21/322; H04N5/335; H04N5/359; H04N5/369; H04N5/372; H04N5/3728
Domestic Patent References:
JP7106544A
JP2001168313A
JP11204771A
JP6338507A
Foreign References:
WO2002095830A1
Attorney, Agent or Firm:
Shinto International Patent Office