To provide a manufacturing method of a stamper for manufacturing optical recording media by forming an oxide film providing an exfoliated face after electroplating without using a processing chemical so as to suppress increase in the surface roughness.
In manufacturing a stamper for manufacturing optical recording media used to transfer ruggedness on the surface of a medium base of an optical recording medium, a first stamper with ruggedness on the surface is formed, oxygen gas ions 33 are produced by plasma process using oxygen gases or oxygen gas ions 33 are produced by ultraviolet ray emission process under an oxygen atmosphere to form an oxide film on a rugged shape forming face of the first stamper (ST). Then a second stamper with a rugged shape along with the rugged shape of the first stamper is formed on an upper layer of the oxide film, and the first stamper is exfoliated at the boundary face between the second stamper and the oxide film. As required, similarly, a third stamper is formed from the second stamper as a stamper for forming a medium base of the optical recording medium.
TOYOKAWA MITSURU
NAKANO ATSUSHI
