To provide a method for manufacturing a superconductive wire rod, which can form a Y-based superconductive layer having a stable composition on a long tape-shaped substrate, also can miniaturize the apparatus and can improve the productivity, and to provide a CVD apparatus.
The method for manufacturing the superconductive wire rod includes: the first step of heating the tape-shaped substrate while moving the substrate, in a substrate introducing region; and the second step of heating the tape-shaped substrate to a film-forming temperature while moving the substrate and also forming the Y-based superconductive layer on the surface of the tape-shaped substrate, in a film-forming region. The first step includes controlling the temperature so that the surface temperature of the tape-shaped substrate does not become higher than the film-forming temperature by more than 30°C. The second step includes introducing a material gas so as to satisfy X
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Hirokazu Sasaki
Shinya Yasunaga
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| JP2005123492A |
Yoshio Arafune