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Title:
熱型赤外線検出装置の製造方法
Document Type and Number:
Japanese Patent JP4944590
Kind Code:
B2
Abstract:

To provide a thermal type infrared sensing device capable of achieving compactness and low costs and provide its manufacturing method.

The thermal type infrared sensing device includes both a thermal type infrared sensing element 1 which is formed through the use of a first wafer (silicon wafer) and in which an infrared sensing part 13 thermally insulated from its surroundings on the side of one surface and a package 2 sealed in such a way as to surround the infrared sensing part 13 on the side of the one surface of the thermal type infrared sensing element 1. The package 2 is formed through the use of a second wafer (silicon wafer). Through hole wirings 15a and 15c electrically connected to the infrared sensing part 13 are formed in the thermal type infrared sensing element 1. The outside dimensions of the thermal type infrared sensing element 1 and the package 2 are identical. A semiconductor lens part 22 made of part of the second wafer is integrally formed in the package 2.

COPYRIGHT: (C)2007,JPO&INPIT


Inventors:
Yoshiaki Honda
Naoyuki Nishikawa
Application Number:
JP2006334975A
Publication Date:
June 06, 2012
Filing Date:
December 12, 2006
Export Citation:
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Assignee:
Panasonic Corporation
International Classes:
G01J1/02; G01J1/04; H01L37/00
Domestic Patent References:
JP2007086770A
JP2007086769A
JP2007086768A
JP2007086767A
JP2007086766A
JP2007191783A
JP2007193293A
JP2006153675A
JP2006058228A
JP2005283435A
JP2005241457A
JP2003273067A
JP2001174323A
JP2000263556A
JP11258038A
JP8327448A
JP5283757A
JP5118909A
Attorney, Agent or Firm:
Keisei Nishikawa



 
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