Title:
熱型光検出器、熱型光検出装置、電子機器および熱型光検出器の製造方法
Document Type and Number:
Japanese Patent JP5672056
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To improve the detection sensitivity of a thermal photodetector.SOLUTION: A thermal photodetector includes: a substrate 10; a support member 215 supported so that a cavity part is formed between the support member 215 and the substrate; a heat detection element 230 supported by the support member; a heat transfer member 260 provided on the heat detection element, including a material with light reflection property with respect to incident light, and having a heat collection part FL having a pattern that allows a part of light delivered to a region of the support member to enter the support member 215 side and a connection part CN for connecting the heat collection part and the heat detection element; a first light absorption layer 270 formed in contact with the heat transfer member between the heat transfer member and the support member; and a second light absorption layer 272 formed in contact with the heat transfer member on the heat transfer member.
Inventors:
土屋 泰
Application Number:
JP2011036886A
Publication Date:
February 18, 2015
Filing Date:
February 23, 2011
Export Citation:
Assignee:
セイコーエプソン株式会社
International Classes:
G01J1/02; H01L27/144; H04N5/33; H04N5/369
Attorney, Agent or Firm:
Inoue 1
Noboru Takekoshi
Yasushi Kuroda
Noboru Takekoshi
Yasushi Kuroda