Title:
熱電変換素子の製造方法
Document Type and Number:
Japanese Patent JP3600486
Kind Code:
B2
Abstract:
A thermoelectric conversion device is manufactured by the following steps of forming. A metallic material is formed on a substrate. A photosensitive resin pattern is formed on the metallic material. Patterned n-type or p-type thermoelectric material elements having a predetermined thickness and electrode junction layers is formed by plating. Next, the photosensitive resin pattern is dissolved and the metallic material is removed. And the substrate having the p-type thermoelectric material elements and the substrate having the n-type thermoelectric material elements are joined with the electrode junction layers interposed between the each thermoelectric material elements and the opposed substrate.
Inventors:
Shuzo Sudo
Matsuo Kishi
Hirohiko Nemoto
Matsuo Kishi
Hirohiko Nemoto
Application Number:
JP23734899A
Publication Date:
December 15, 2004
Filing Date:
August 24, 1999
Export Citation:
Assignee:
Seiko Instruments Inc.
International Classes:
H01L35/08; H01L35/16; H01L35/18; H01L35/32; H01L35/34; (IPC1-7): H01L35/34; H01L35/08; H01L35/16; H01L35/32
Domestic Patent References:
| JP9298316A | ||||
| JP8153901A | ||||
| JP10070317A | ||||
| JP11177151A | ||||
| JP10229223A | ||||
| JP8330638A | ||||
| JP8046248A |
Attorney, Agent or Firm:
Yoshiharu Matsushita