Title:
MANUFACTURING METHOD FOR THIN FILM
Document Type and Number:
Japanese Patent JP2011256452
Kind Code:
A
Abstract:
To provide a manufacturing method capable of forming a thin film of a metallic compound on a base material at lower temperature.
The method by which a metallic compound thin film is formed on a base material of a synthetic resin member formed from a thermosetting resin or a thermoplastic resin includes a step S10 for preparing sol containing a thin film forming material, a step S20 for applying the sol onto the base material, a step S30 for leading a plasma source gas into a reaction chamber provided with the base material on which the sol is applied, and forming plasma of the gas, and a step for forming a sol-derived thin film on the base material by the action of the plasma.
Inventors:
INE HOKUTO
Application Number:
JP2010133843A
Publication Date:
December 22, 2011
Filing Date:
June 11, 2010
Export Citation:
Assignee:
SHARP KK
International Classes:
C23C20/06; B32B9/00
Attorney, Agent or Firm:
Makoto Abe
Teshima Masaru
Hiroaki Yamane
Michiko Oi
Teshima Masaru
Hiroaki Yamane
Michiko Oi