Title:
薄層構造の製造方法
Document Type and Number:
Japanese Patent JP2008538810
Kind Code:
A
Abstract:
A method for manufacturing a thin-layer structure is disclosed. In one embodiment a macroporous supporting structure substrate having a plurality of pores that do not pass through the entire thickness of the substrate layer, a sacrificial layer is applied on the surface of the pore walls and the pore bottoms of the supporting structure substrate. The supporting structure substrate is partly removed on the rear side, such that a region of the sacrificial layer is uncovered on the rear side of the supporting structure substrate. A thin layer is applied on the rear side surface of the supporting structure substrate and also on the uncovered region of the sacrificial layer. The sacrificial layer in the pores is removed selectively with respect to the thin layer, such that the pore bottoms are formed by the thin layer.
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Inventors:
Lehmann, Volker
Application Number:
JP2007557318A
Publication Date:
November 06, 2008
Filing Date:
February 13, 2006
Export Citation:
Assignee:
INTERNATIONAL BUSINESS MASCHINES CORPORATION
International Classes:
G21K5/00; C23C16/40; C23C16/42; H01J35/18; H01L21/316
Domestic Patent References:
| JP2004525778A | 2004-08-26 | |||
| JP2005003564A | 2005-01-06 | |||
| JP2004525778A | 2004-08-26 | |||
| JP2005003564A | 2005-01-06 |
Attorney, Agent or Firm:
Kenzo Hara International Patent Office