Title:
MANUFACTURING METHOD OF THIN OXIDE SEMICONDUCTOR FILM
Document Type and Number:
Japanese Patent JPS529897
Kind Code:
A
Abstract:
PURPOSE: To manufacture by vacuum vaporization thin semiconductor films which have good reproducibility, and have any resistance value over a wide range from low to high resistance.
Inventors:
SHINOHARA KOUICHI
SHIMIZU YASUHIRO
SHIMIZU YASUHIRO
Application Number:
JP8530375A
Publication Date:
January 25, 1977
Filing Date:
July 14, 1975
Export Citation:
Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
C23C14/08; H01B13/00; H01C17/08; H01L21/363; (IPC1-7): H01C17/08; H01L21/363
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