Title:
MANUFACTURING METHOD OF TITANIC ACID ZIRCONIC ACID LEAD FILM
Document Type and Number:
Japanese Patent JP2007308782
Kind Code:
A
Abstract:
To provide a method for stably manufacturing a titanic acid zirconic acid lead film having no shortage of lead.
The method for manufacturing the titanic acid zirconic acid lead film on a substrate by an RF-magnetron sputtering method using a target made of a titan acid zirconic acid lead as a raw material comprises a substrate heating step of heating the substrate, and a sputtering film forming step of forming a film on the substrate by the RF-magnetron sputtering method while keeping the substrate temperature heated in the substrate heating step. In the sputtering film forming step, a gas including lead is introduced into ambient gas.
COPYRIGHT: (C)2008,JPO&INPIT
Inventors:
MIYAURA TOMOKO
Application Number:
JP2006141148A
Publication Date:
November 29, 2007
Filing Date:
May 22, 2006
Export Citation:
Assignee:
KONICA MINOLTA HOLDINGS INC
International Classes:
C23C14/08; H01L21/316; H01L21/8246; H01L27/105; H01L41/18; H01L41/22; H01L41/316; H01L41/39
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