Title:
MANUFACTURING METHOD OF TITANIUM AMIDE COMPLEX
Document Type and Number:
Japanese Patent JP2011088851
Kind Code:
A
Abstract:
To provide a method for manufacturing a titanium amide complex (3) useful for manufacturing a titanium-containing thin film by a CVD method, an ALD method or the like from an easily available raw material simply in a good yield.
The titanium amide complex of general formula (3) is manufactured by causing a titanium alkoxo complex to react with a lithium dialkylamide. In the formula, R1 and R4 are each independently a 1-6C alkyl group; R2 and R3 are each independently a hydrogen atom or a 1-3C alkyl group; and R6 and R7 are each independently a 1-4C alkyl group.
Inventors:
TADA KENICHI
YAMAMOTO TOSHIKI
IWANAGA KOHEI
YAMAMOTO TOSHIKI
IWANAGA KOHEI
Application Number:
JP2009243395A
Publication Date:
May 06, 2011
Filing Date:
October 22, 2009
Export Citation:
Assignee:
TOSOH CORP
SAGAMI CHEMICAL RES INST
SAGAMI CHEMICAL RES INST
International Classes:
C07C249/02; C07C251/12; C23C16/18; H01L21/28; H01L21/285; C07F7/28
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