Title:
MANUFACTURING METHOD OF VIBRATOR
Document Type and Number:
Japanese Patent JP2015128266
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a manufacturing method of a vibrator capable of efficiently and accurately performing a frequency adjustment.SOLUTION: A manufacturing method of a vibrator includes: a mounting step of mounting a vibration element 2 having a weight portion 5 on a base 91; a lid bonding step of bonding a lid 92 to the base 91 and forming an accommodation space S for accommodating the vibration element 2 by the base 91 and the lid 92; and an adjustment step of irradiating a laser beam LL to the weight portion 5 via the lid 92 and sucking a weight material B removed while adjusting a resonant frequency of the vibration element 2 by removing at least a part of the weight portion 5.
Inventors:
YAMADA AKINORI
YOSHIDA SHUHEI
YOSHIDA SHUHEI
Application Number:
JP2013273624A
Publication Date:
July 09, 2015
Filing Date:
December 27, 2013
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
H03H3/04
Attorney, Agent or Firm:
Tatsuya Masuda
Kazuo Asahi
Kazuo Asahi