Title:
導波素子、発光装置及び導波素子の製造方法
Document Type and Number:
Japanese Patent JP6824112
Kind Code:
B2
Abstract:
According to one embodiment, a waveguide element includes a first crystal region, and a second crystal region. The first crystal region extends in a first direction and includes a first nitride semiconductor. The second crystal region extends in the first direction, includes a second nitride semiconductor, and is continuous with the first crystal region. A second direction crosses the first direction. The second direction is from the first crystal region toward the second crystal region. A <0001> direction of the first crystal region is from the first crystal region toward the second crystal region. A <0001> direction of the second crystal region is from the second crystal region toward the first crystal region.
Inventors:
Tokiki Hikosaka
Application Number:
JP2017096573A
Publication Date:
February 03, 2021
Filing Date:
May 15, 2017
Export Citation:
Assignee:
Toshiba Corporation
International Classes:
G02F1/377; G02B6/12; G02B6/132; H01S5/026
Domestic Patent References:
| JP2103521A | ||||
| JP2003077847A | ||||
| JP2014052526A |
Foreign References:
| WO2005067031A1 | ||||
| WO2006114999A1 | ||||
| US20110012109 | ||||
| KR1020140022631A | ||||
| WO2014054284A1 |
Attorney, Agent or Firm:
Masahiko Hinataji