To provide a weighing apparatus capable of preparing mixed solutions at low costs or preparing required mixed solutions from a small amount of specimen, to provide a manufacturing method capable of easily manufacturing this weighing apparatus, and to provide a mixing apparatus using the weighing apparatus.
In the manufacturing method of the weighing apparatus for liquids, the weighing apparatus comprises both of a first recess and a second recess shallower than the first recess in a substrate 2. The first recess and the second recess communicate with each other on the opening side of their upper parts and have independent recesses independent of each other on the side of their bottoms. The independent recess of the second recess is formed in such a way as to have a prescribed capacity. A plurality of types of masks 10 (10a, 10b, 10c) having different opening diameters are used to collectively dry-etch the substrate 2 and to form at least the first recess and the second recess in the substrate 2 through the use of micro-loading effects.
Masatake Shiga
Kazunori Onami