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Title:
照明光学系、露光装置及びデバイスの製造方法
Document Type and Number:
Japanese Patent JP5239830
Kind Code:
B2
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Inventors:
Norio Miyake
Application Number:
JP2008326322A
Publication Date:
July 17, 2013
Filing Date:
December 22, 2008
Export Citation:
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Assignee:
NIKON CORPORATION
International Classes:
H01L21/027; G02B19/00; G03F7/20
Domestic Patent References:
JP2006140393A
JP2002184676A
JP2003243276A
JP2008160072A
Attorney, Agent or Firm:
Hironobu Onda
Makoto Onda



 
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