PURPOSE: To reduce the load of an operator and improve the mapping efficiency by sending a mapping operation completion signal to an external controller when the mapping operation is completed.

CONSTITUTION: When the mapping operation is started, a host computer 3 sets the first analysis condition and analysis position on an electron beam microanalyzer(EPMA) 1 according to the preset analysis schedule and sends the mapping start command to a mapping device 2. Then it waits for the completion signal from the mapping device. On the other hand, when the mapping device 2 receives the mapping start command, it starts the mapping operation and collects data and stores them in its image memory. When one mapping operation is completed, the completion signal is sent to the host computer 3, the host computer 3 checks whether the analysis schedule is completed or not, if the result is NO, the next analysis condition and analysis position are set by the EPMA 1, the operation is repeated, when the analysis schedule is digested, the mapping operation is completed.