Title:
MARK DETECTION DEVICE, ALIGNMENT DEVICE, FILM-FORMING DEVICE, MARK DETECTION METHOD, AND FILM-FORMING METHOD
Document Type and Number:
Japanese Patent JP2022038048
Kind Code:
A
Abstract:
To provide a technique for increasing detection precision of a mark formed on a board for alignment.SOLUTION: A mark detection device for detecting a board mark of a board having the board mark that is a linear mark and in which the thickness of a line in a first area near an edge of a line is larger than the thickness of a line in a second area other than an area near the edge includes photographing means for photographing an image of a captured area including the board mark, and detection means for detecting a position of the board mark by comparing a photographed image photographed by the photographing means with a model image, and the model image is an image that is linear while the length of a line is equivalent to the second area of the board mark.SELECTED DRAWING: Figure 6
Inventors:
KANDA HIROSHI
Application Number:
JP2020142333A
Publication Date:
March 10, 2022
Filing Date:
August 26, 2020
Export Citation:
Assignee:
CANON TOKKI CORP
International Classes:
G01B11/00; C23C14/04; G03F9/00; H01L21/683; H01L51/50; H05B33/10
Domestic Patent References:
| JP2019039072A | 2019-03-14 | |||
| JP2014071315A | 2014-04-21 | |||
| JP2013084407A | 2013-05-09 | |||
| JPH08304810A | 1996-11-22 | |||
| JP2012028664A | 2012-02-09 | |||
| JP2014121727A | 2014-07-03 |
Attorney, Agent or Firm:
Hidewa Patent Office