Title:
MARK INSPECTING METHOD
Document Type and Number:
Japanese Patent JP3200748
Kind Code:
B2
Abstract:
PURPOSE: To properly judge a defect in an object image to be inspected even unless a binary-coding process is properly done by converting an input image signal into a digital signal and performing the binary-coding process, then extracting feature quantities of independent patterns which do not connect with each other in a reference image, and comparing the feature quantities of corresponding patterns of the reference image and image to be inspected.
CONSTITUTION: A master image of a reference mark is inputted by using an input device such as a TV camera. Then this image is converted into binary data and the feature quantities of plural independent patterns in the image are calculated and registered together with their positions. When the object image is inspected, an image of a mark to be inspected is inputted by the TV camera and converted into binary data, and the feature quantities of independent patterns are calculated. The feature quantities are compared with the feature quantities of the independent patterns of the master image which are registered in advance and when the both are different, it is judged that the inspected object mark has a defect.
Inventors:
Yuji Ueno
Hisami Nishi
Hisami Nishi
Application Number:
JP8700492A
Publication Date:
August 20, 2001
Filing Date:
April 08, 1992
Export Citation:
Assignee:
NIPPON SHEET GLASS COMPANY,LIMITED
International Classes:
G01B11/24; G01N21/88; G01N21/93; G06K5/00; G06T1/00; G06T7/00; (IPC1-7): G06K5/00; G01B11/24; G01N21/88; G06T7/00
Domestic Patent References:
| JP61110275A | ||||
| JP63267583A |
Attorney, Agent or Firm:
Ohno Seiichi