Title:
マスククリーニング装置及びマスククリーニング方法
Document Type and Number:
Japanese Patent JP6533948
Kind Code:
B2
Inventors:
Tetsuya Tanaka
Application Number:
JP2015146706A
Publication Date:
June 26, 2019
Filing Date:
July 24, 2015
Export Citation:
Assignee:
Panasonic IP Management Co., Ltd.
International Classes:
B41F35/00; B41F15/08; B41F15/12
Domestic Patent References:
| JP2010280088A | ||||
| JP2011093215A |
Foreign References:
| KR1020090085826A |
Attorney, Agent or Firm:
Kenji Kamada
Koichi Nomura
Koichi Nomura