To provide a mask holding device holding a mask without wrinkles so that a single mask having no mask frame is conveyed on a substrate or the position of the mask to the substrate is adjusted.
A mask holding and positioning device 5 including a magnetic material, and holding a sheet-shaped mask having openings for patterning a thin film formed on a substrate, is provided with a mask magnetically attracting plate 54 by which the mask is magnetically attracted on one surface side by a plurality of permanent magnets disposed on the other side. The plurality of permanent magnets are so constituted that magnetic field distribution of a first region on the one surface side of the mask magnetically attracting plate 54 and magnetic field distribution of a second region of the one surface side are different from each other.
HAYASHI TERUYUKI
TOBE YASUHIRO
ORIMO FUMIO
Hideno Kono