PURPOSE: To enable to transcribe the mask portrait on the base board with a high accuracy at the time of carrying out sputtering and evaporation, by equipping the heat insulating mask having holes being the same to the metal mask or a size larger pattern between the metal mask and mask frame.

CONSTITUTION: The heat insulating mask 20 is equipped between the metal mask 7 and the mask frame 8 and then the base board 5, the metal mask 7 and the mask 20, are attached and fixed on the base board holding plate 4 by the frame 8 and the fixing screw 9. The mask 20 is provided with the hole 21 being the same to the hole 6 of the metal mask or a size larger pattern. Target material is passed through each hole 6, 21 of the mask 20 and the mask 7 and is stuck on the surface of the board 5 in accordance with the portrait of the hole 6. On this occasion, radiation heat from the target is interrupted by the mask 20 and adhered state is maintained without producing deformation by heat expansion. Clear transcribed film is obtained on the board 5 by the above mask jig.