Title:
MASK FOR LASER MACHINING AND METHOD OF MANUFACTURING FOR THE SAME
Document Type and Number:
Japanese Patent JP3348283
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a mask for a laser machining which is not deformed by the heat induced by laser beam radiation.
SOLUTION: A mask 10 having a machining pattern for a laser machining is formed of a mask member layer 12 made of a metallic material having the machining pattern and a first and a second base plate members 11 and 13, composed of a laser beam transmissible material, which clamp the mask member layers on the upper and lower faces.
Inventors:
Shiro Hamada
Application Number:
JP2000019505A
Publication Date:
November 20, 2002
Filing Date:
January 28, 2000
Export Citation:
Assignee:
Sumitomo Heavy Industries Ltd.
International Classes:
B23K26/06; B23K26/064; B23K26/066; (IPC1-7): B23K26/06
Domestic Patent References:
| JP6447551A | ||||
| JP876357A |
Other References:
宮崎 俊行 外３名，レーザ加工技術，日本，産業図書株式会社，１９９１年 ５月３１日，Ｐ．１２−１９
Attorney, Agent or Firm:
Yosuke Goto (1 person outside)