Title:
マスク製造方法
Document Type and Number:
Japanese Patent JP4570151
Kind Code:
B2
Inventors:
Kazumi Haga
Motoshi Sakai
Motoshi Sakai
Application Number:
JP2005135133A
Publication Date:
October 27, 2010
Filing Date:
May 06, 2005
Export Citation:
Assignee:
Nano System Solutions Co., Ltd.
International Classes:
G03F1/76; H01L21/027
Domestic Patent References:
| JP2002072452A | ||||
| JP6013716A | ||||
| JP5013303A | ||||
| JP2002506236A | ||||
| JP2002506231A |
Attorney, Agent or Firm:
Yoshio Arafune