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Title:
MASK MEMBER, COATING APPARATUS, COATING SYSTEM AND COATING METHOD
Document Type and Number:
Japanese Patent JP2008000678
Kind Code:
A
Abstract:

To reduce the size of the meniscus formed on the side surface of a masking tape.

The masking tape 1 is equipped with a tape-like base material 11, a pressure-sensitive adhesive layer 12 and the absorbent members 13 provided on both sides 103 of the masking tape 1. The masking tape 1 is pasted on the main surface 90 of a substrate 9 while its under surface edge 105 is allowed to coincide with the boundary of the coating region and non-coating region 92 on a substrate 9. In the side surface 103 of the masking tape 1, the lateral edge surface of the pressure-sensitive adhesive layer 12 becomes a non-absorbing region 1031 non-absorbent with respect to an organic EL liquid and the exposure region in each of the side surfaces 103 of the absorbent member 13 becomes an absorbing region 1032 absorbent with respect to the organic EL liquid. When the substrate 9 is coated with the organic EL liquid the organic EL liquid 93 adhered to the side surfaces 103 of the masking tape 1 is absorbed by the absorbent members 13. By this constitution, the height of the meniscus 94 formed on each of the side surfaces 103 of the masking tape 1 can be reduced.


Inventors:
Kawagoe, Michifumi
Masuichi, Mikio
Matsuka, Takeshi
Application Number:
JP2006000172359
Publication Date:
January 10, 2008
Filing Date:
June 22, 2006
Export Citation:
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Assignee:
DAINIPPON SCREEN MFG CO LTD
International Classes:
B05C17/06; B05C5/00; B05D1/26; B05D1/32; H01L51/50; H05B33/10; B05C17/00; B05C5/00; B05D1/26; B05D1/32; H01L51/50; H05B33/10