Title:
MASK PROJECTION COPYING EQUIPMENT FOR WORK PIECE
Document Type and Number:
Japanese Patent JPS60108855
Kind Code:
A
Inventors:
BUERUNAA BUEE TABARERI
ERUNSUTO REEBATSUHA
ERUNSUTO REEBATSUHA
Application Number:
JP21529384A
Publication Date:
June 14, 1985
Filing Date:
October 16, 1984
Export Citation:
Assignee:
TABARELLI WERNER W
International Classes:
H01L21/30; G02B7/28; G03F9/00; H01L21/027; (IPC1-7): G02B7/11; G03F9/00; H01L21/30
Attorney, Agent or Firm:
Kiyotaka Sasaki
Previous Patent: JPS60108854
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