Title:
プラズマアッシャーによるマスクレジスト剥離方法及びその装置
Document Type and Number:
Japanese Patent JP4810633
Kind Code:
B2
Inventors:
Tsuneaki Kuwashima
Shinichi Hasegawa
Nakatsu
Hiro Kawaura
Shingo Anzai
Tomoaki Kamiyama
Shinichi Hasegawa
Nakatsu
Hiro Kawaura
Shingo Anzai
Tomoaki Kamiyama
Application Number:
JP2006298731A
Publication Date:
November 09, 2011
Filing Date:
November 02, 2006
Export Citation:
Assignee:
Seto Giken Industry Co., Ltd.
CV Research Inc.
Toppan Printing Co., Ltd.
CV Research Inc.
Toppan Printing Co., Ltd.
International Classes:
G03F1/82; H01L21/027; H01L21/304; H01L21/3065
Domestic Patent References:
| JP6124926A | ||||
| JP8139004A | ||||
| JP7221075A | ||||
| JP2000150483A | ||||
| JP2002289580A | ||||
| JP6175350A |
Attorney, Agent or Firm:
Kunio Nakagawa