Title:
マスクトレイ、及び、太陽電池セルの製造方法
Document Type and Number:
Japanese Patent JP7454357
Kind Code:
B2
Abstract:
To prevent unintended film formation in an area to be shielded on a semiconductor substrate.SOLUTION: A mask tray 5 used in a manufacturing process of a solar cell including a transparent conductive layer formed by a depot-up method on a region excluding an outer edge region and on a region excluding a boundary line region defining a plurality of rectangular subsections with straight lines substantially parallel to one side in at least one main surface of a semiconductor substrate 2, and a plurality of current collecting electrodes formed on the transparent conductive layer includes a mask body 52 that is attached to an opening 53 that is covered with the semiconductor substrate 2 during film formation. The mask body 52 includes a mask frame 521 that holds the outer edge region of the semiconductor substrate 2 from below, and a boundary line region holding unit 522 that holds the boundary line region of the semiconductor substrate 2 from below.SELECTED DRAWING: Figure 2
Inventors:
Masanori Fukuda
Kanta Yoshikawa
Kanta Yoshikawa
Application Number:
JP2019200069A
Publication Date:
March 22, 2024
Filing Date:
November 01, 2019
Export Citation:
Assignee:
Kaneka Corporation
International Classes:
H01L31/0224; H01L31/0747; H01L31/18
Domestic Patent References:
| JP7335587A |
Foreign References:
| WO2012105155A1 | ||||
| WO2017078164A1 | ||||
| WO2010047101A1 | ||||
| US20190249306 |
Attorney, Agent or Firm:
Patent Attorney Corporation Fujimoto Partners