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Patent Searching and Data


Title:
MASK FOR VAPOR DEPOSITION, AND PRODUCTION METHOD THEREFOR
Document Type and Number:
Japanese Patent JP2004238685
Kind Code:
A
Abstract:

To eliminate adverse effects on the positional precision of a pattern caused by radiant heat as much as possible with respect to a mask for vapor deposition, and to allow it to cope with high precision patterning.

In the mask 1 for vapor deposition provided with a thin sheet-shaped mask body 2 in which an opening 4 with a shape corresponding to a vapor deposition pattern is formed, and a frame body 3 which is formed so as to have a hot wire expansion coefficient equal to that of the object to be vapor-deposited, and to which the mask body 2 is fixed in a state where tension is applied to the mask body 2, the tension to be applied to the mask body 2 is set so that the amount of strain caused on the mask body 2 by heat stress by radiant heat on vapor deposition is canceled by the amount of strain caused on the mask body 2 by the tension.


Inventors:
NAGASAKI HIDEO
KAMIYAMA ISAO
Application Number:
JP2003029386A
Publication Date:
August 26, 2004
Filing Date:
February 06, 2003
Export Citation:
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Assignee:
SONY CORP
International Classes:
C23C14/04; C23C14/24; H01L51/50; H05B33/14; H05B33/10; (IPC1-7): C23C14/04; C23C14/24; H05B33/10; H05B33/14
Attorney, Agent or Firm:
Funabashi Kuninori