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Patent Searching and Data


Title:
MASKING DEVICE FOR MULTIPLE UNITS IN VACUUM VAPOR DEPOSITION USED FOR MANUFACTURING ORGANIC EL ELEMENT
Document Type and Number:
Japanese Patent JP2003068454
Kind Code:
A
Abstract:

To provide a masking device in which it is possible to carry out a vacuum vapor deposition in manufacturing an organic EL element with high productivity and high-precision patterning.

This is constituted so that the second metal mask 13 provided with a screen part 13A with a constitution that numerous minute slits with numerous minute distances are arranged in parallel on a base plate 12 which also serves as the first metal mask equipped with a plural number of windows 18 to regulate the range of the vapor deposition, so that one end of this is fixed to the base plate 12 by a mask clamp 20, so that the other end is fixed to a slider 23, so that a tensile force is given to the screen part 13A of the second metal mask by giving a spring force to the slider 23 by compression coil spring 30, and so that the slit is maintained in a straight state with a prescribed pitch. A high-precision pattern can be formed on a substrate with a multiple units by arranging and carrying out the vapor deposition on the substrate 17 on this second metal mask 13.


Inventors:
TSUCHIYA TERUNAO
SAKATA TAKUYA
Application Number:
JP2001255233A
Publication Date:
March 07, 2003
Filing Date:
August 24, 2001
Export Citation:
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Assignee:
DAINIPPON PRINTING CO LTD
International Classes:
C23C14/04; G09F9/00; G09F9/30; H01L27/32; H01L51/50; H05B33/10; (IPC1-7): H05B33/10; C23C14/04; G09F9/00; G09F9/30; H05B33/14
Domestic Patent References:
JP2002069619A2002-03-08
Attorney, Agent or Firm:
Kyozo Norimatsu