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Title:
MASS ANALYZING SYSTEM
Document Type and Number:
Japanese Patent JP61088445
Kind Code:
A
Abstract:

PURPOSE: To enable to detect deflection on ion optical path in a mass analyzing system, by applying AC voltage of the same phase overlapping to the DC voltage to the electrodes opposite to each of electrodes of a tetrode lens.

CONSTITUTION: As well as connecting Y direction DC power supply 7Y and X direction DC power supply 7X between the opposite electrodes of a tetrode lens 6 in a mass analyzing system, an AC power supply 8 of the same phase is applied through a switch 9. By overlapping the AC voltage over the DC voltage by turning on the switch 9, the ion displays a deflected peak wave pattern 9 with an effect of the AC voltage, on a display 5 through a detector 4, affected from the AC voltage, while no ion is on the center path of the tetrode lens, by which a deflection can be detected. Therefore, the center path of ion can be readily controlled depending on the deflection value.


Inventors:
Uchida, Minoru
Application Number:
JP1984000208236
Publication Date:
May 06, 1986
Filing Date:
October 05, 1984
Export Citation:
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Assignee:
HITACHI LTD
International Classes:
G01N27/62; H01J49/06; H01J49/32; H01J49/42; (IPC1-7): H01J49/42



 
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