Title:
マスフローコントローラーの監視
Document Type and Number:
Japanese Patent JP6671090
Kind Code:
B2
Abstract:
This invention relates to a method of monitoring a Mass Flow Controller (MFC) connected to a pressure chamber for supplying gas to the chamber, which is an unpumped condition, including cyclically switching the MFC to create successive fill cycles for a test period and measuring the chamber pressure at intervals during the test period characterised in that the total switch time of the MFC is at least 10% of the fill cycle and in that the method includes obtaining the average of the pressure measurements and comparing them with historical data to determine whether or not the MFC is functioning properly.
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Inventors:
Simon Jones
Ippingson
Ippingson
Application Number:
JP2012119596A
Publication Date:
March 25, 2020
Filing Date:
May 25, 2012
Export Citation:
Assignee:
SPTS Technologies Limited
International Classes:
G05D7/06
Domestic Patent References:
| JP736547A | ||||
| JP9184600A | ||||
| JP201294108A |
Attorney, Agent or Firm:
Patent Corporation yki International Patent Office