Title:
質量流量コントローラのシステムおよび方法
Document Type and Number:
Japanese Patent JP4864280
Kind Code:
B2
Abstract:
A system and method for controlling a mass flow controller to have a constant control loop gain under a variety of different types of fluids and operating conditions, and for configuring the mass flow controller for operation with a fluid and/or operating conditions different from that used during a production of the mass flow controller. Further, the system and method includes providing control by reducing the effects of hysteresis in solenoid actuated devices by providing a non-operational signal to the solenoid actuated device.
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Inventors:
Lulu, John M
Wang, Chun
Valentine, william s
Saggio, Joseph A., Junior
Wang, Chun
Valentine, william s
Saggio, Joseph A., Junior
Application Number:
JP2002584094A
Publication Date:
February 01, 2012
Filing Date:
April 24, 2002
Export Citation:
Assignee:
Brooks Instrument LRC
International Classes:
G01F1/00; G05B11/36; G01F25/00; G05B5/01; G05B13/04; G05D7/06
Domestic Patent References:
| JP10111152A | ||||
| JP643517A | ||||
| JP4262408A | ||||
| JP1194604A |
Attorney, Agent or Firm:
Shinjiro Ono
Kazuo Shamoto
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita
Tadashi Ueda
Kazuo Shamoto
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita
Tadashi Ueda