Title:
マスフローコントローラ
Document Type and Number:
Japanese Patent JP6782138
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To cope with a proportional valve having a large orifice diameter, while hindering fluctuation of gas flow rate.SOLUTION: On the basis of an extended control voltage range WL set by extending a reference control voltage range WS, a control circuit 11 outputs an extended control voltage VL corresponding to an amount of operation. A control voltage conversion circuit 12 converts the extended control voltage VL from the control circuit 11 into a voltage corresponding to the reference control voltage range WS from the extended control voltage range WL of the extended control voltage VL, and then outputs an obtained reference control voltage VS. A voltage current conversion circuit 13 converts the reference control voltage VS from the control voltage conversion circuit 12 into a current, and applies an obtained drive current IL to a solenoid L of a proportional valve 20, thereby adjusting a gas flow rate Q.SELECTED DRAWING: Figure 1
Inventors:
Osamu Momose
Application Number:
JP2016190714A
Publication Date:
November 11, 2020
Filing Date:
September 29, 2016
Export Citation:
Assignee:
Azbil Co., Ltd.
International Classes:
G05D7/06
Domestic Patent References:
| JP2043070B2 | ||||
| JP2000081914A | ||||
| JP2013040653A | ||||
| JP2007087294A | ||||
| JP8303629A | ||||
| JP3177669A |
Attorney, Agent or Firm:
Shigeki Yamakawa
Masaki Yamakawa
Masaki Yamakawa